Semiconductor Equipment Suppliers

Wafer Cleaning Equipment Suppliers

• ACM Research
• Veeco
• JEC (Japan)
• 北方华霖

Thin Film Deposition

• SPTS (UK, KLC)
• KDF （more for compound semiconductors and universities)
• LPCVD (Tystar)
• CentroTherm oxidizer ~ 1.6 m Euro activator ~ 1.3 m Euro , leadtime ~ 22 months as of March 2023

Wafer Grinding & Polishing Equipment Suppliers

• Revasum (for SiC single wafer)

Test Equipment Suppliers

• KLA Candela 8520 SiC PL (2022)
• Sica 88 （160 m JPY)
• Wafer thickness measurement : FTIR Nicolet IS50
• Wafer warping monitor: Tropel Flat Master 200
• Wafer doping measurement: MCV-530L
• Oxidation surface analyzer: Surface Charge Analyzer (SCA Nanospec/NanoDUV) used by Berkely & Stanford SNF : thin film thickness measurements (> 10 nm) . It ban be found at CAEOnline.com
• Nanospec China