Epitaxy － GaN

• Epilayer and chip makers 
• Costs for GaN on Si, SiC, and GaN :

Patent issue with Boston Univ.’s method of growth GaN epitaxy on a buffer layer:  Patent Coverage of Impossible Embodiments: A Cautionary Tale for Patent Owners, and Lingering Questions (2019) 

The advantages of using silicon substrates are large diameter (8-inch) and low cost (less than $1/cm2). The researchers estimate the cost of 4-inch silicon carbide substrates at ~$5/cm2, while 2-inch GaN-on-GaN wafers cost ~$50/cm2.

General Information

•     Introduction to epitaxy by AIXTRON